设备技术参数 Equipment technical parameters |
真空室材质 Vacuum chamber material | 不锈钢、碳钢 Stainless steel, carbon steel |
蒸镀方式 Metalizing mode | 单面镀膜、双面镀膜 Single side coating, double side coating |
蒸镀模式 Metalizing model | 感应蒸发 Induction of evaporation |
有效镀宽 Effective width of coating | 500mm-1700mm |
最大卷径 Max.rolling diameter | Φ500-Φ1300mm |
卷绕速度 Wind speed | 1m/min-15m/min(2m/min-30m/min) 1m/min-15m/min(2m/min-30m/min) |
可镀材料 Can be plated material | 铜、铬、钛、银等 Cu, Cr, Ti, Ag, etc |
镀膜基材 Coating substrate | 海绵、薄膜、布等卷材 Sponge, film, cloth, etc |
常用真空抽气时间 Commonly used vacuum extraction time | 清洁容器抽至9×10-3pa≤30min Clean the container until 9×10-3pa≤30min |
极限真空抽气时间 Limit vacuum time | 清洁空容器抽至7×10-4Pa≤24h Clean empty containers and pump until 7×10-4pa≤24h |
极限压力(清洁、空载) Extreme pressure (clean, no load) | 7×10-4Pa |
水冷辊直径 Diameter of water-cooled roll | φ250mm-φ1200mm |
水冷辊冷冻工作温度 Water cooling roller freezing working temperature | -25℃~80℃ |
靶体形式 The target body form | 平面靶、圆柱靶 Plane target, cylindrical target |
磁控靶电源 Magnetic target power supply | 直流、中频 Dc, if |
磁控靶工作压力 Magnetic target operating pressure | 2×10-1Pa |
磁控靶工作气体 Magnetically controlled target working gas | 氩气、氧气,纯度99.99% Ar, O2, 99.99% purity |
磁控靶工作气体控制方式 Magnetic target working gas control mode | 质量流量控制器控制 Mass flow controller control |
卷绕系统 The winding system | 采用原装西门子恒张力全自动收放卷系统 The original Siemens constant tension automatic winding and unwinding system is adopted |
舒展系统 Stretch system | 电动可调360º舒展系统 Electrically adjustable 360 ° stretch system |
驱动电机 Drive motor | 西门子电机 Siemens motor |
气胀轴 Inflatable shaft | 胀块式、键条式等 Bulk-type, key-bar type, etc |
气胀轴直径 Inflation axis diameter | 3″、 6″气胀轴 3 ", 6 "gas expansion axis |
真空系统 Vacuum system | ZJ1200罗茨泵,速度为1200升/秒 ZJ1200 roots pump, speed 1200 L/S |
ZJ3000罗茨泵,速度为3000升/秒 ZJ3000 roots pump with a speed of 3000 L/S |
2H150滑阀泵,每台速度150升/秒 2H150 slide valve pump, 150 L/S per set |
2X-30旋片泵,每台速度 30升/秒 2X-30 rotary vane pump, each speed of 30 L/S |
深冷捕集器 Cryogenic trap |
功率 power | 100KW-400KW |
电源 The power supply | 380V 三相五线 380V Three phase five wire |